Abstract: This paper studies the atomic oxygen erosion effect on ITO/Kapton/Al by using the ground facility. Samples were exposed to a fluence of 9.1×1019 atoms/cm2 under 10-2 Pa vacuum condition. Sample temperatures 25℃, 70℃, 100℃, 120℃ and 150℃ were selected to reveal the possible influences of sample temperature on atomic oxygen effects. Mass loss of samples was measured by high precision micro-electron balance after the test to obtain the reaction ratio. Emissivity and solar absorbance were measured by TEMP 2000 and LPSR 300. It is shown that the ITO can well protect the base material and the mass loss and the reaction ratio of samples are low. Results also indicate that the sample temperature has little effect on the mass loss, but a great effect on the physical property.