Abstract: The solar absorptance (αs) degradation of ITO/Kapton/Al films under irradiation of different energy electrons is studied. The X-ray photoelectron spectroscopy (XPS) and the scanning electronic microscope (SEM) are used to analyze the element contents and the morphologies of the samples. It is shown that the solar absorptances of the samples are degraded more severely by higher energy electron irradiation with the same irradiation flux. The morphologies of the samples are all changed little after various energy electron irradiations. The irradiation effects on the atomic contents of the samples are also discussed.