Abstract:
This paper proposes a self-developed standard device for vacuum calibration, which combines three methods, that is, the direct dynamic comparison method, the direct static comparison method, and the static expansion method, to meet the requirements of a wide range. The device can be used for calibrating various types of vacuum gauges ranging between 1×105 and 5×10-4 Pa. It features simple structure, easy operation and high efficiency that is specially suitable for a large number of routine calibrations, whose main technical specifications such as background pressure, pressure stability, and volume ratio in the static expansion method are in line with the requirements in the ISO and the domestic vacuum standards.