航天元器件关键工艺的统计过程控制方法

Statistical process control of key processes for space-level component

  • 摘要: 文章以统计过程控制(SPC)中的均值—标准差(X—R)控制图理论方法为基础,以宇航元器件关键工序中的集成电路键合拉力强度为研究对象,提出宇航元器件关键工序进行SPC的必要性,并提出以(X—R)控制图作为质量工具对宇航元器件关键工艺进行质量监控的方法,计算出该关键工艺的过程能力指数。

     

    Abstract: Based on the average value - standard deviation () control chart theory of the statistical process control(SPC), the bond strength of the integrated circuit, as an important parameter in processing space-level components and parts, is investigated. The importance of the SPC in processing space-level components and parts is discussed, with the () control chart as a tool for quality control. The process power index in the above key process is calculated.

     

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