Abstract: The silica antireflective films on normal glass substrates were prepared by the sol-gel method with TEOS as the precursor to the ethanol solvent. Orthogonal experimental method was used to determine the best ratio of raw materials and the main factors which affect the properties of coatings. The microstructure and transmittance properties of thin films were characterized by X-ray diffraction and UV-Vis spectrophotometer. The results show that taking hydrochloric acid as catalyst in the preparation of coatings on glass substrates, the average transmission rate can be increased by 3%, the structure is amorphous, TEOS and water content are the main factors.