超高真空环境下测试产品的放气分析

Outgassing analysis of testing products in ultra-high vacuum

摘要: 本文介绍了材料放气的理论和模型，同时运用费克定理推导出圆柱型测试产品的理论放气率，并介绍了测量放气率的两种常用方法：定容法和小孔流导法。文中指出了运用小孔流导法存在的三个问题，并通过双规流导（TGT）法解决了此类问题。

Abstract: This paper discusses the theory and models of materials outgassing. Theoretical outgassing rates of typical (cylindrical) testing products are obtained by using Fick’s law. Two methods of measuring the outgassing rate are proposed, which are the constant volume method and the orifice throughput method. Three problems of the orifice throughput method are analyzed and solved by the twin gauge throughput (TGT) method.