用制冷机低温泵获得清洁无油高真空
Production of Dry-Clean High-Vacuum with Refrigerator’s Cryopumps
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摘要: 制冷机低温泵以其抽速大和无污染的特点,在各行各业得到了广泛的应用。文章介绍了制冷机低温泵的工作原理、结构和特点,以及在国外空间环境模拟设备上的使用情况。着重介绍了自主设计生产的制冷机低温泵在国内最大的空间环境模拟设备中调试和测量的情况,为获得清洁无油高真空取得了良好的效果。Abstract: Refrigerator’s cryopumps is widely used because of its high pumping velocity and dry-clean nature. The theory, main structure and characteristics of the cryopump are introduced, together with its applications in the space environment simulators in foreign countries. The debugging and measurement using refrigerator’s cryopumps developed by our institute and used in KM6 in producing dry-clean high-vacuum are discussed in this paper.