Abstract: In order to analyze the influence of electrostatic force on the collision-induced deposition of charged lunar dusts on smooth glass surface, an experimental system for charged microparticles was established. Considering the influence factors such as pole-plate voltage, particle size, and tilt angle of glass specimen, the deposition mechanism of charged particles with 2 μm to 13 μm in diameter on smooth glass surface was studied. The experimental results show that due to the effect of electrostatic force, the number of deposited particles with the same size increases with the increase of the pole-plate voltage. Under the same voltage, the number of deposited particles gradually increases with the decrease of particle size. The number of deposited particles with an average size of 2.15 μm in diameter increases by 114% under charges of 14 kV compared with that of pole-plate voltage of 0 V. The number of deposited particles with the same size decreases with the increase of tilt angle of glass specimen when the pole-plate voltage is less than 6 kV. The increase of deposited charged particles on the glass surface with a tilt angle of 45° is the largest among those with a tilt angle in the range of 30° to 60°. The proposed research may provide a reference for the design of lunar dust protection for space probes.