Abstract: A plasma traceability measurement device was designed in this article to verify the performance of the inductively coupled plasma (ICP) as a calibration source. It is to identify the optimal plasma testing conditions that satisfy the traceability calibration of the Langmuir probe, and to improve the test accuracy. The control variable method was used to investigate the stability and uniformity of electron density and electron temperature, the repeatability of electron density of ICP source under different working conditions. The results show that, when the measurement time is within 5-20 min, the stabilities of electron density and electron temperature of plasmas are better than 99.4% and 98.9% respectively. When the probe inserts into the vacuum chamber 440-480 mm, the uniformities of electron density and electron temperature of plasmas are better than 97.2% and 93.6% respectively. When the discharge power of the plasma source is 100-900 W, the repeatability of electron density is better than 86.6%, most of which is superior to 92%. The proposed research may provide a reference for the future optimization of the plasma diagnostic means.