Abstract: The detection of lunar dust deposition amount is the core of timely activating functional component for lunar dust removal, and also the key of intelligent dust removal with a low power consumption. In view of the limitations of existing methods for detecting lunar dust deposition amount and the advantages of interdigital capacitance detectors, in this paper, an intelligent deposition detection method for lunar dusts based on the configuration of planar interdigital capacitance was proposed. An analytical capacitance model for lunar dust deposition amount was constructed, which included a lunar dust deposition layer combined with a dielectric layer of interdigital capacitance substrate. The correlation mathematical algorithm between the detector’s own capacity and the amount of lunar dust deposition was obtained. The optimal design method of lunar dust deposition capacitance detector was given. The simulation and test results show that the error of the experimental and the calculated capacitance with different metallization ratios of detector is less than 2%. The research may provide a new sensing method for the low power intelligent dust removal technology.