Abstract: To investigate the effects of the micro-textures and the impact mode of the particles on the damage of the surface micro-textures of the photovoltaic glass, a simulation model is established, with experimental verification, for categorized analyses. It is shown that the damage form of the surface micro-textures caused by the particle impact is mainly of the edge damage, the split damage and the fracture for the lunar dust simulant of 30 μm diameter impacting the surface micro-textures. The damage area is smaller than the overall area of the surface micro-textures, and the damage depth ranges from 0.06 μm to 0.29 μm, 1% to 4.8% of the height of the surface micro-texture. For the normal frontal collision, the quadrangular frustum pyramid shape enjoys the best durability, followed by the cone-shape, and the hexagonal frustum pyramid. For the four collision modes, the degree of damage to the surface micro-textures for edge collision, the 45° edge collision, the normal collision, and the 45° center collision is in a descending order. The results can provide some reference for the process modification of surface micro-textures on the glass.