Abstract: The vibration tuning fork is designed to be the core component of the vibration capacitance surface potential detection sensor. The vibration form of the tuning fork relevant with the potential detection is analyzed, and the structural parameters and the driving mode of the tuning fork are determined; The factors influencing the sensitivity and the accuracy of the sensor are analyzed based on the transfer function; A method is proposed for designing the potential measurement device based on the charge induction and the electrostatic field simulation. The sensitivity of the sensor is consistent with the theoretical calculation results. Finally, the sensor design is verified by the prototype calibration experiment.