探针校准用ECR等离子体源特性试验研究

Experimental study of characteristics of ECR plasma source for probe calibration

摘要: 为验证ECR等离子体源作为探针校准装置中标准等离子体发生器的可行性，试验研究微波管电流、气压等不同放电条件对ECR等离子体源的耦合作用，以及放电产生的等离子体特征参数的稳定性、均匀性和重复性。结果表明：在合适的放电条件下，ECR等离子体源产生的等离子体特征参数重复性较好，在300 mm×200 mm的空间范围内分布均匀且在2 h内较稳定。因此，可以在探针校准装置中使用ECR等离子体源作为标准等离子体发生器。

Abstract: This paper explores the feasibility of using a microwave ECR plasma source as a standard plasma generator in a probe calibration device. The coupling of the input power and the air pressure with the plasma source is experimentally studied, as well as the repeatability, the uniformity, and the stability of the characteristic parameters of the plasma. It is shown that under a proper discharge pressure, the characteristic parameters of the ECR plasma source are uniformly distributed within an area of 300 mm× 200 mm, and remain stable within two hours, that means a good reproducibility. Therefore, it is feasible to use a microwave ECR plasma source as a standard plasma generator for a probe calibration device.