Structural design and optical system simulation of ion source for microscale mass spectrometer
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摘要: 文章针对多领域对便携式质谱仪的需求，对微尺度质谱仪的核心部件离子源进行结构设计，并利用离子光学模拟软件SIMION进行仿真，探究电极电压、透镜结构、电极结构等对离子传输的影响并进行优化，获取相关参数研究规律，为微尺度质谱仪的研制提供设计依据。Abstract: In view of the demand of the portable mass spectrometer in many fields, the structure of the ion source, as the core functional component of the microscale mass spectrometers, is designed, and its ion optical system is simulated by the software SIMION. The effect of the electrode voltage, the lens structure, and the electrode structure on the ion width and the divergence angle are investigated and optimized. The related parameters obtained may provide a basis for the development of microscale mass spectrometers.
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图 6 引出极、聚焦极电压对离子束宽影响
Figure 6. Effect of voltage of extraction electrode and focusing electrode on ion beam width
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图 9 不同聚焦透镜下末端电极处离子束散角情况
Figure 9. Ion beam divergence angle at the end electrode for different focusing lens
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图 11 不同电极间距下末端电极处离子束散角情况
Figure 11. Ion beam divergence angle at the end electrode for different electrod distances
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图 12 电离室出口宽度及电极开口宽度对离子束宽影响
Figure 12. Effect of ionization chamber and electrode opening width on ion beam width
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图 13 不同电离室出口宽度下的离子束散角情况
Figure 13. Ion beam divergence angle at the end electrode for ionization chamber opening width
表 1 不同聚焦电极对离子束宽的影响
Table 1 Effect of different focusing electrodes on ion beam width
离子源类型 离子束宽/mm 传统离子源 0.141 2 单透镜离子源 0.118 2 五级单透镜离子源 0.096 9 
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