Abstract:
The micro-vibration acceleration sensor can measure as low an acceleration as 10-5g or even in a lower level, but its dynamic calibration of the acceleration in that level is a hard issue with the normal technology to garantee the accuracy and the precision of the measurement. To solve this prolem, this paper proposes a combined approach for calibration:first, set up a beam as the control object, and install the acceleration sensor on it; then use the laser vibrometer and the acceleration sensor for the measurement at the same point on the beam; finally, compare the measurement results to determine the accuracy of the acceleration sensors. We have also designed an experiment to calibrate a predefined acceleration sensor to show the effectiveness of this method. It is indicated that the laser vibrometer is a good instrument for calibration, and the comparison result for the predefined sensor is satisfatory; the almost same results are obtained in both ways not only in the time domain but also in the frequency domain, and their relative deviation is as low as about 10%, which satisfies the demand of the calibrating method.