Abstract: Based on the space environmental requirements and the characteristics of MTM anti-fuse devices, this paper analyzes the performance of MTM anti-fuse programmable units in aerospace applications. A reliability evaluation method for MTM anti-fuse units is proposed, and the reliability of the units before and after programing is evaluated. The applicability of the MTM anti-fuse process in the space environment is verified by TID and SEE tests. It is shown that the MTM anti-fuse process can meet the requirements in the space environment, and the MTM anti-fuse device is of high reliability and good adaptability to the environment in spacecraft applications.