Abstract: Due to its advantages of simple structure, credibility and low-power consumption, the metal-oxide-silicon (MOS) capacitance type sensor is successfully used in foreign countries to detect the orbital micro-debris, but so far not in domestic studies. In this paper, the detection principle of the MOS capacitance sensor is introduced. A charging and discharging model for the orbital micro-debris impact MOS capacitance sensor is built. Then the simulation is carried out by using ADS software. The MOS capacitance sensor's key parameter is confirmed and the structure and process design of MOS capacitance sensor is completed. Based on the sensor, an array probe is designed and fabricated. Finally, with the array probe, the ground high-speed particulate impact test is carried out. The array probe sensor has experienced dozens of high-speed impacts, without affecting its ability to measure the high-speed impact event, which verifies the feasibility of using the probe for the on-orbit space micro-debris detection.