低温泵常见故障分析及其解决措施

Analysis of typical troubles in the cryopump and related trouble-shooting measures

  • 摘要: 文章对低温泵运行过程中所发生的冷头及氦压缩机典型故障进行了原因分析,并提出了解决措施。最后提出了使低温泵可靠稳定运行的建议。

     

    Abstract: This paper mainly analyzes the possible causes of typical trouble about cold head and helium compresser in the course of using the refrigerator cryopumps. The paper proposes several trouble-shooting measures for the refrigerator cryopump's stable and reliable operation.

     

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