Abstract: The temperature in various films irradiated by the repeat rate pulse laser is determined by ANSYS finite element software. The results indicate that with the same pulse duration, the temperature accumulation of films increases with the increase of the laser repeat rate at the same irradiation time. With the same ratio of the pulse duration to the laser period, the temperature rise increases with the pulse duration at the same irradiation time. The repeat rate affects only the temperature accumulation and of the two factors that affect the temperature accumulation, the pulse duration is more important. There are some limited declining of the temperature accumulation increase under repeat rate(f), pulse duration(tp) and irradiation time. With air cross-ventilation coefficient of 8W/(m2?℃), power density of 1.794×108 W/m2, facula laser spot diameter of 0.14mm, and the product of repeat rate and pulse duration less than 10-5, no temperature accumulation variation can be observed after one second of laser irradiation. With increased product of repeat rate and pulse duration, and longer temperature accumulation time, there will be more temperature rise.